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全部作者： 赖秀琼 陈俊芳 Silie Fu Wei Li Maoping Zhang Lei Shi Chunlin Yang 第1作者单位： 华南师范大学 论文摘要： The spatial plasma density distribution in the reaction chamber of the quartz tube microwave plasma apparatus is diagnosed at p = 1.20 kpa, Pw = 440W by a Langmuir probe, obtaining the biggest plasma density 1.05×1012/cm3. Also, the plasma density under different discharge gas pressure and power is diagnosed. Diamond-like carbon films are achieved at p = 6.8kPa, Pw = 680W with CH4 flow rate being 6ml/min and H2 flow rate being 200ml/min and detected by AFM, Raman spectroscopy instrument and profiler. 关键词： Langmuir probe; Diamond-like carbon thin films (浏览全文) 发表日期： 2006年11月07日 同行评议：
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